FLOWRATE CONTROL METHODS BASED ON PLC IN WAFER CLEAN TOOL

Flowrate control methods based on PLC in wafer clean tool

Several in common use flowrate control methods in semiconductor wafer clean tool are introduced in this paper, including the flowrate control of process chamber and chemical proportioning, then corresponding control methods are brought forward according to different applications.The chemical flowrate is directly used as the feedback signal of close

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Usage and validation of a fluid structure interaction methodology for the study of different suction valve parameters of a hermetic reciprocating compressor

The dynamics of the flatter valves inside a hermetic reciprocating compressor used in household appliances is the most important factor concerning the gas dynamic behaviour of such a compressor.Hence for a good valve design and for a reliable simulation of Bucket Hat the compressor the ability to predict the movement of the valves is indispensable.

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Drowsiness Detection Using Ocular Indices from EEG Signal

Drowsiness is one of the main causes of road accidents and endangers the lives of road users.Recently, there has been considerable interest in utilizing features extracted from electroencephalography (EEG) signals to detect driver drowsiness.However, in most of the work performed in this area, the eyeblink or ocular artifacts present in EEG signals

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